High Temperature Effusion Cell
High Temperature Effusion Cell (HTEC)
Key features
- Max. operation temperature 2000°C.
- Temperature stability better than ±0,1°C.
- Excellent uniformity.
- Single self-standing W-filament.
The High Temperature Effusion Cell (HTEC) is used to deposit low vapour pressure materials with high melting points compatible with a UHV system.
The HTEC features a self-supporting tungsten filament coil that surrounds the crucible to provide uniform heat distribution over the entire region. The hot zone of the cell is manufactured from refractory metals that have proven to operate well in nitride or oxide systems. The design allows a maximum continuous operating temperature of 2000°C.
Depending on the application, the used crucible material may limit the top temperature. DCA offers crucibles made of tantalum, pyrolytic graphite, molybdenum, tungsten, glassy carbon or oxide crucibles. DCA also offers a crucible especially designed for evaporation of liquid titanium.
Product accessories
- Temperature control package.
- TDK Lamba power supplies.
- C-type thermocouple cables (bakeable).
- Eurotherm PID controller (1-loop).
- Bakeable water-cooling lines.
Specifications
| Volume | 10 cc, 25 cc |
| Max. operating temperature | 2000°C |
| Max. outgassing temperature (max. 30 min) | 2100°C |
| Temperature stability | Better than ± 0.1°C |
| Max. temperature ramp rate | Up to 100°C/min |
| Thermocouple | C-type |
| Cooling water flow* | > 0.5 l/min, max 30°C |
| Mounting flange** | DN35CF/DN63CF/DN100CF |
