Proven thin film technology

for demanding materials

Ultra-High Vacuum Systems for Thin Film Deposition

At DCA Instruments, we specialize in delivering custom ultra-high vacuum (UHV) systems for thin film deposition, focusing on advancing material growth capabilities through cutting-edge technologies. Our expertise spans Molecular Beam Epitaxy (MBE), Physical Vapor Deposition (PVD), and Pulsed Laser Deposition (PLD).

P-Series MBE enables high-quality III-V growth with excellent uniformity, ideal for high electron-mobility applications.

M-Series MBE offers unparalleled flexibility for metal/metal-oxide deposition while maintaining high performance.

R-Series MBE is the ideal tool for oxide/chalcogenide research featuring a rapid refill system for every source.

UHV PLD / Laser MBE allows high temperature processing in atmospheric environments for small samples.

UHV Sputtering /PVD delivers faster deposition while
preservingthe materials high-quality in UHV.

Automated transfer is ideal for production systems that require reliable performance 24/7 every day of the year.

Manual transfer allows for continuous system expansion with robust and safe handling, perfect for an R&D environment.


Effusion cells for all low-, mid-, and high-temperature MBE processing.

Crackers / Valved sources for group-V and volatile materials (e.g. Hg).

Sputter Magnetrons with RF/DC bias for UHV applications.

Gas delivery systems encompass a wide range of applications, including Ozone, Metalorganics (e.g. TTIP), RF Atom / Plasma source, and more…

Electron Beam Sources – for demanding refractory materials.

Reliable substrate manipulators for production and research.

Analytical components (e.g. BFM, QCM) for your systems.

All necessary accessories (e.g. carriers, crucibles).

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Hybrid MBE system for C2N, CNRS

Hybrid MBE system for C2N, CNRS

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MBE System to KU Leuven

MBE System to KU Leuven

DCA Instruments Delivers Custom MBE Cluster Tool to KU Leuven
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