At DCA Instruments, we specialize in delivering custom ultra-high vacuum (UHV) systems for thin film deposition, focusing on advancing material growth capabilities through cutting-edge technologies. Our expertise spans Molecular Beam Epitaxy (MBE), Physical Vapor Deposition (PVD), and Pulsed Laser Deposition (PLD).
P-Series MBE enables high-quality III-V growth with excellent uniformity, ideal for high electron-mobility applications.
M-Series MBE offers unparalleled flexibility for metal/metal-oxide deposition while maintaining high performance.
R-Series MBE is the ideal tool for oxide/chalcogenide research featuring a rapid refill system for every source.
UHV PLD / Laser MBE allows high temperature processing in atmospheric environments for small samples.
UHV Sputtering /PVD delivers faster deposition while
preservingthe materials high-quality in UHV.
Effusion cells for all low-, mid-, and high-temperature MBE processing.
Crackers / Valved sources for group-V and volatile materials (e.g. Hg).
Sputter Magnetrons with RF/DC bias for UHV applications.
Gas delivery systems encompass a wide range of applications, including Ozone, Metalorganics (e.g. TTIP), RF Atom / Plasma source, and more…
Electron Beam Sources – for demanding refractory materials.
Thin film deposition in ultra high vacuum (UHV) environment is our business. We design and manufacture advanced thin film deposition systems for Molecular Beam Epitaxy (MBE), UHV Magnetron Sputtering and Pulsed Laser Deposition. Since the company was founded in 1989, DCA has installed more than 300 UHV systems around the world.