UHV Systems

UHV Systems

Production

M-Series

Molecular Beam Epitaxy for Metals & Oxides
(12"/300 mm wafer)

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P-Series

Molecular Beam Epitaxy for III-V
(3x8" wafer)

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Research

M-Series

Molecular Beam Epitaxy for Metals & Oxides
(4" wafer)

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P-Series

Molecular Beam Epitaxy for III-V
(4" wafer)

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R-Series

Molecular Beam Epitaxy for Oxides
(3" wafer)

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Pulsed Laser Deposition

Pulsed Laser Deposition
(Laser MBE)

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