Sources

Sources

Effusion Cells

High Temperature Effusion Cell

High Temperature Effusion Cell
Max. 2000°C K-Cell

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Retractable Effusion Cell

Retractable Effusion Cell

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Standard Temperature Effusion Cell

Standard Temperature Effusion Cell
Max. 1400°C K-Cell

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Low Temperature Effusion Cell

Low Temperature Effusion Cell
Max. 1000°C K-Cell

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Valved Sources

Arsenic Valved Cracker

Arsenic Valved Cracker
(AsVC)

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Corrosive Materials Valved Cracker

Corrosive Materials valved cracker
(CMVC) for Sb, Cd, Te, Se, and Zn

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Mercury Valved Source

Mecury Valved source
(HgVS)

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Phosphorus Valved Cracker

Phosphorus valved cracker
(PVC)

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Gas Delivery

Ozone Delivery System

Oxygen Delivery system
(ODS)

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RF Plasma Source (DCAX)

RF Plasma Source
(DCAX) for Nitrogen, Oxygen and Hydrogen

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Metal-Organic Precursor Injector

Metal-Organic Precursor Injector
(MOPI)

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Sputter Magnetron

Magnetron Sputter Source (APEX)

APEX Sputter Source

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E-Beam Source

E-Beam Source (M-Series)

E-Beam Source Module
(M-Series)

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E-Beam Source (R-Series)

E-Beam Source R-Series Module

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