Ozone Delivery System

The automated Ozone Delivery System (ODS) has been specifically developed to produce, collect, store, and deliver high purity Ozone to a UHV thin film system. The ODS is an integral part of the DCA Oxide System portfolio and has been operating for more than 10 years developing and growing complex oxides.

The ODS requires just 1 hour of distillation to collect enough volume of Ozone for up to 10 hours of growth. The ODS can deliver pure Ozone or pure Oxygen via is water cooled UHV chamber injector. Ozone collection can be observed by a camera looking at the purple colour of silica gel in the still.

There are two versions of the ODS, the original LN₂ cooled variant and a new Closed Cycle model for laboratories with limited LN₂ or requiring high usage of Ozone.

The ODS includes all parts required for injecting directly into a vacuum system, including:

Ozone Generator.
Ozone destruction unit.
Water cooled Ozone transfer piping.
Water cooled Ozone injector.
Software control of different modes.

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Cluster Tool Overview

M-Series growth chamber:
- M800 – up to 6” wafer
- M1000 – up to 12” / 300 mm wafer
Central distribution chamber (CDC) with wafer handling robot
Cassette load lock chamber – 10/25 (300 mm wafers)
Preparation chamber – suitable for high-temperature processing or ion/plasma cleaning
Storage chamber – for mask/sample storage (optional)
High uniformity UHV sputter / metallization chamber (optional)

Special Features
Fast material loading capability for effusion cells and e-beams are available to extend growth campaigns and limit the system downtime to essential maintenance.

Achievable Results:

Record-breaking Pockels coefficient (Barium Titanate on 300 mm Si): 1500 pm V-1
Particle Count (300 mm Si): 91 (heated w/ rotation to 950 °C)

Specifications

Base Pressure:	< 3×10-10 Torr
Large cryopanel surrounds internal chamber wall	Steel
Use temperature	100-200 °C
Weight	5-10 Kg
Delivery time	2-3 weeks from order
Width	3114mm
Width	3114mm
Width	3114mm
Width	3114mm

Base Pressure: < 3×10-10 Torr
Large cryopanel surrounds internal chamber wall
Source ports custom-designed for the application
Easily serviceable, side-mounted, electro-pneumatic source shutters
Analytical ports available for:

- Beam Flux Monitor
- Quartz Crystal Microbalance
- XBS for sources
- RHEED
- Viewports
- Optical Pyrometer
- Atomic absorption / Ellipsometry (Optional)