RF Plasma Source (DCAX)

DCAX RF Atom Sources

A gas plasma is an effective tool for conversion of highly stable source gases such as N2 or O2 to more active atomic and molecular species suitable for MBE, PLD and sputtered growth of electronic materials. The DCAX-60 provides the stability and reproducibility required with a wide beam profile and no gas leakage. For DCA systems, the source length and exit aperture are modelled for optimum uniformity and growth rates.

The DCAX RF atom sources are available as DCAX-30 and DCAX-60 variants for both smaller and larger substrates.

Nitrogen 0.5sccm at a range of powers no frame

More details

Typical applications for the DCAX are:

Oxide growth
- High bandgap semiconductors
- High TC superconductors
- Optical coatings
- Dielectrics
Oxygen doping
- III-V materials
Nitride growth
- Optoelectronics
- RF devices
Nitrogen doping
- II-VI materials
- Thin film photovoltaics (CdTe)
- Dilute Nitrides
Substrate cleaning
- Removal of residual carbon (O2)
- Surface passivation (H2)

Optical Plasma Emission Monitoring

Optical plasma emission monitoring can give an insight into which molecular and atomic species are being generated in the plasma. Optical emission monitoring can be achieved by attaching a spectrometer to the flange mounted viewport and monitoring plasma emission lines.

The DCAX range includes as standard:

Single unit discharge bulb to prevent gas leakage and optimize control at low dosing fluxes.

Easy replacement of discharge bulb to allow swapping between gas types or easy replacement.

The smaller DCAX-30 with a 30mm beam diameter is ideal for smaller sub 100 mm/4” substrates, whilst the DCAX-60 has a beam diameter of 50 mm making it ideal for the largest substrates.

The DCAX incorporates a unique water-cooled gas inlet, to help contain the plasma in the discharge zone, for high-rate film growth at high powers and gas flux.

As a premium MBE system manufacturer, we have integrated the mounting of the Automatic Matching Network, for quick and easy removal for system bakeout saving time and protecting from handling errors.

Discharge Bulb Selection Guide