Corrosive Materials Valved Cracker
Corrosive Materials Valved Cracker (CMVC)
Key features
- Designed for cracking and depositing Sb, Cd, Te, Se and Zn.
- 500 cc tank capacity.
- Quick and simple refilling with sliding rail mechanism.
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More details
The Corrosive Materials Valved Cracker (CMVC) is a corrosive series source designed to be used with corrosive materials and other suitable low temperature materials such as Sb, Cd, Te, Se, and Zn. The source cracks molecules up to a maximum temperature of 1100°C. The valve mechanism ensures process repeatability with precise control of the material flux.
The source construction consists of three main regions; tank, tube, and valve/cracking zone. Each of these regions can be heated independently and are measured using individual thermocouples (two K-type and one C-Type). A PID temperature feedback loop is provided for controlling the heating zones. The source is water-cooled.
The maximum degassing temperatures are: 1200°C for the cracking zone and 700°C for the tank and tube. Temperature stability better than ±0.1°C can be achieved with high quality PID controllers and power supplies.
Specifications
| Volume | 500 cc |
| Max. material size | 30 mm diameter |
| PBN aperture | PBN-A-1 for ≤ 4” wafer PBN-A-2 for > 4” wafer |
| Tank temperature | 700°C degas, 600°C operation |
| Tube temperature | 700°C degas, 600°C operation |
| Valve/Cracking zone temperature | Cracking zone (valve): 1200°C degas, 1100°C operation |
| Max. temperature (without water-cooling) | 500°C (all parts) |
| Temperature stability | Better than ± 0.1°C |
| Thermocouple type | Tank: K-type Tube: K-type Cracking zone (valve): C-type |
| In-vacuum length (IVL) | 213 mm / custom |
| Outer diameter (OD) | 61 mm |
| Mounting flange | DN100CF |
| Cooling water | Tank/valve: >0.7 l/min, max 30°C Cracking zone: > 0.7 l/min, max 30°C |
