Production Manipulator

Production Manipulator

Key Features

  • First UHV manipulator for 300 mm /12″ silicon wafers 
  • Excellent thermal uniformity 
  • No wafer bowing or warp effect 
  • Reliable performance and low maintenance
  • Multi-wafer capability up to 3×8”/200 mm

Robust and reliable performance is a high priority for production systems as long growth campaigns are key for a successful business. That is why DCA prioritises quality control with rigorous testing as an integral part of our manufacturing process of all component parts and assemblies.  

Delivering high-quality growth is key for breakthrough results that allow cutting-edge technology to be achieved. This means minimising the presence of defects and contamination from all areas of the system including the manipulators.  

Excellent thermal uniformity is critical for all growth processes and requires multiple heating zones to ensure the best possible performance. The intelligent design of these heating elements is the key to our success for delivering outstanding performance. Each heating zone includes a thermocouple that allows careful calibration and control across the entire wafer region.  

As part of the automated transfer in production systems, the motion is fully motorised and can be programmed as part of the recipe process. System interlocks ensure safe operation and protect the manipulator in the event of error conditions (e.g. power loss, increased pressure). 

Specifications

Feature Specifications
Substrate size

4×4”/100 mm,

3×8”/200 mm,

4x 6”/150 mm,

8″/ 200 mm

12″/300 mm

Custom

Mounting flangeDN450CF or DN400CF
Heater element

Silicon Carbide (SiC)

Pyrolytic boron nitride/ pyrolytic graphite (PBN-PG)

Graphite (Sig-G)

Ta-Wire 

Thermal UniformityBetter than ± 3 °C (excl. 5mm edge)
Temperature

Eurotherm PID controller (programmed)

900 °C (@ 5E-5 Torr)

1000 °C (UHV @ Si Surface)

1150 °C (UHV @ TC)

Motion

Motorised continuous rotation: 0.1 – 60 rpm

Motorised linear z-motion (fork) – automated

Power

LEMO connectors

DC power supplies for inner and outer filaments

Water-cooling

Integrated to top flange

Internal cooling for contacts

Bakeable water-cooling lines

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