Motor Control Units
Motor control units
- Robust and reliable motorized control.
- Quick and simple operation.
- Interfaced with DCA control software.
DCA’s motorized components require a dedicated motor control unit (MCU); these are designed and manufactured to ensure reliable performance and compatibility with DCA’s logic and control software.
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Product code and description
| Product | Description |
| MCU-BFM | Motorized linear motion of the beam flux monitor |
| MCU-C-LL/ST | Motorized linear motion of the load lock/ storage chamber cassette (automated transfer systems) |
| MCU-F | Motorized substrate manipulator fork motion (automated transfer system) |
| MCU-IE(G) | Motorized pocket indexer for e-beam source |
| MCU-IST | Target indexer and sweep for target manipulator (PLD system) |
| MCU-LTL | Sample loading tool for UHV load lock (automated transfer system) |
| MCU-MS/WS | Motorized linear motion of the main substrate shutter or wedge shutter |
| MCU-QCM | Motorized linear motion of the quartz crystal microbalance |
| MCU- R/T-CDC | Motorized rotational / translational motion of the CDC robot wafer handler. |
| MCU-RS | Motorized substrate manipulator rotation (manual and automated transfer systems) |
| MCU-RT | Motorized target rotation for target manipulator (PLD system) |
| MCU-TV | Motorized UHV throttle valve for down-stream pressure control |
| MCU-VA-(material) | Motorized valve actuator for sources with metering valve |
| MCU-XS/YS | Motorized substrate manipulator table x- / y- linear motion |
| MCU-Z | Motorized substrate manipulator linear z-motion (manual transfer system) |
Each motor control unit is supplied with:
- Mains power cable.
- Sensor cable (motion interlock).
- Communication cable (PC interface).
- Stepper motor cable.
