Mercury Valved Source
Mercury (Hg) Valved Source
Key features
- Better than ± 0.5% flow stability.
- Flow range between 40-140 sccm.
- Safe and reliable for dependable performance.
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More details
The Mercury Valved Source (HgVS) is specifically designed for generating Hg flux for the growth of thin films in a UHV process chamber. The HgVS is based on the principle of viscous flow of gas through an orifice. The mercury flux is controlled via the mercury pressure upstream, and the effect of fluctuations in the mercury pressure downstream on the flux is minimized. All surfaces exposed to mercury are constructed from high quality stainless steel.
The mercury pressure is adjusted via a Eurotherm PID controller which provides a control signal to the metering valve motor control unit (MCU). K-type thermocouples measure the tank, valve and injector temperature. Temperature stability better than ±0.1°C is achieved with the high quality PID controllers and power supplies.
Specifications
| Feature | HgVS-1000 | HgVS-2000 |
| Tank volume | 1000 cc | 2000 cc |
| Recommended filling | 900 cc (12 kg) | 1800 cc (24 kg) |
| Max. tank (TC) temperature | 195°C | 195°C |
| Max. top heater (TC) temperature | 290°C | 290°C |
| Max. bakeout temperature | 350°C | 350°C |
| Max. ramp rate | 5°C/min | 5°C/min |
| Temperature stability | better than ± 0.1°C | better than ± 0.1°C |
| Thermocouple type | K-type x3 | K-type x3 |
| In-vacuum length (IVL) | 292 mm / custom | 292 mm / custom |
| Outer diameter (OD) | 61 mm | 61 mm |
| Mounting flange | Injector DN63CF | Injector DN63CF |
| Weight | Approx. 25 kg | Approx. 37kg |
Product Accessories Overview
| Accessory | Part Description |
| Power supplies (3) | TDK GEN60-12.5 x1 (for the gas injector). Solid state relay (SSR)/ Thyristors x3 (for source tank, valve, and heating jacket). |
| Eurotherm PID controller (3) | Dual-loop 3508, for temperature control of metering valve and tank via the SSR. Dual-loop 3508, for temperature control of heating jacket (via the SSR) and injector (via TDK Lambda PSU). |
Motor control unit (1) (MCU-VA) | Includes a human-machine interface (HMI), communication interface, and digital interface. The IP address is labelled on the MCU rear panel. |
| Stepper motor (1) | Drives the metering valve and controlled by the MCU-VA. |
| Stepper motor cable (1) | Connects the MCU to the needle valve stepper motor. |
| Sensor/Encoder cable (1) | Provides position feedback of the stepper motor. |
| Toque limiter (1) | Positioned between the stepper motor and metering valve to limit the applied torque. |
| Capacitance manometer (1) | MKS Instruments Baratron measures the tank pressure up to 30 mBar. |
| Baratron cable (1) | Connects the MKS Baratron to Eurotherm PID controller. |
| I/O control cable (1) | Connects the MCU to the ET PID controller. |
| Power cables (6) | LEMO power cable for injector bakeable to 200°C. Three SSR power cables. Two mains power cable (for MCU and ET PID controller). |
| Thermocouple cables (4) | 4x K-type thermocouples, bakeable to 200°C. |
| Heating jacket (2) | For the DN16CF SS bellows and injector valve. These are connected in parallel to one solid-state relay. |
| Insulating jacket (2) | This surrounds the mercury source to prevent external heat transfer. |
| DN16CF flange clamp (2) | Connection of SS bellows to source and injector. |
| Material funnel (1) | Load material directly to the tank via the manual leak valve. |
