Standard Temperature Effusion Cell

Standard Temperature Effusion Cell (STEC)

Key features 

  • Max. operation temperature 1400°C. 
  • Temperature stability better than ±0.1°C. 
  • Excellent uniformity with wide range of crucibles from 13 cc to 2000 cc. 
  • Single filament, dual filament, and hot-lip variants are available. 

The Standard Temperature Effusion Cell (STEC) is used to deposit a wide range of materials with a moderate vapour pressure (e.g. Ga, Al, Si, Cu …) for molecular beam epitaxy (MBE). The STEC features a patented flat foil Tantalum filament that minimizes the temperature difference between the crucible and the filament. The filament design has many benefits: 

  • Better thermal load distribution. 
  • Rigid design, deformation limited. 
  • No magnetic field due to the opposing coils compensating each other. 
  • The top connecting ring can be designed so that the crucible orifice may be hotter than the crucible body, improving beam quality. 

 

Available crucible capacities are 6 cc, 13 cc, 20 cc, 23 cc, 40 cc, 60 cc, 100 cc, 150 cc and 200 cc. Both conical and bottle neck crucible designs are available. For bigger crucible volumes of 500 cc, 1000 cc and 2000 cc, the used filament is either pBN-coated PG or Ta-wire. 

A single filament STEC, or STEC-SF, is suitable for depositing e.g. aluminum or doping Si and Be. When delivered from DCA, the aluminum STEC-SF considers the special requirements of the Al. It keeps the crucible lip cold to prevent creeping, heats slowly near the melting point and keeps the Al molten during error conditions. 

A dual filament STEC, or STEC-DF, features two independent heating filaments split between the upper and lower crucible sections. Adjusting the top filament prevents material condensation on the crucible orifice, while maintaining optimal evaporation with the main filament. It is the most suitable for growing very low defect density films of gallium or indium. 

Specifications

FeatureSTEC-SF, -DF, -TFSTEC-PBN
Volume6 – 200 cc500 cc, 1000 cc
Max. operating temperature1400°C1400°C
Max. outgassing temperature (max. 30 min)1600°C1450°C
Temperature stabilityBetter than ± 0.1°CBetter than ± 0.1°C
Max. temperature ramp rateUp to 100°C/minUp to 100°C/min
ThermocoupleC-typeC-type
Cooling water flow*> 0.5 l/min, max 30°C> 0.5 l/min, max 30°C
Mounting flange**CustomizableDN150CF

* If equipped with water-cooling shroud.

**Depends on the cell volume and available chamber port.

Product accessories 

  • Temperature control package.  
  • TDK Lamba power supplies. 
  • C-type thermocouple cables (bakeable, K-type optional). 
  • Eurotherm PID controller (1-loop for SF, 2-loop for DF). 
  • Bakeable water-cooling lines. 

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