Bakeout System
Bakeout Systems
Key features
- Custom-designed for each module.
- High quality tent lining with high-temperature
velcro fasteners. - Integrated interlock to monitor vacuum level and prevent exceeding safe pressures.
For a system to achieve the ultimate base pressure, it is necessary to heat/bake the system to desorb adsorbed gas species from the chamber walls/cryopanels and remove them via the pumping system.
The advantages of using a bakeout tent/jacket guarantees a uniform heating of the chamber and eliminates the possibility of cold spots that can accumulate material/contaminants that can affect the processing and lead to lower-quality materials.
A bakeout system is provided for each DCA module, e.g. process chamber or transfer module (CDC).
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More details
The bakeout system for process chambers or linear transfer system is comprised of:
- A custom-designed, high-quality, flexible bakeout tent (with support frames).
- A mobile bakeout heater with forced air circulation unit.
- Eurotherm PID temperature controller.
- K-type thermocouple.
- Vacuum interlock (feedback from a vacuum gauge controller).
For other modules (e.g. CDC), a custom-design bakeout jacket with integrated heating element is supplied.
Contact us for more information.
