Transfer Accessories
Transfer Accessories
Sample Trolley
A sample trolley is used to transfer/store carriers within the linear buffer chamber (LBC). The standard sample trolley features two levels, i.e. each cup position may hold two wafer carriers, one above the other due to the different slot indents. One top-level space is vacant to allow for the redistribution of samples.
- For 2” wafers – 13 (2×7)
- For 3” wafers – 9 (2×5)
- For 4” wafers – 7 (2×4) / custom
Pick-up manipulator (PUM)
The PUM is a magnetically coupled spring-loaded vertical lift manipulator that is used to pick/place carriers to/from the sample trolley, transfer arm, and other transfer locations (e.g. UHV suitcase).
Transfer arm
The transfer arm features a sample cup that is used to transfer a sample carrier between the process chamber and the LBC. The transfer arm is magnetically coupled as standard but may be motorised as a special feature. The transfer arm includes a position sensor to act as a motion interlock and prevents collisions from occurring during manual transfer.