UHV Suitcase
UHV Suitcase
Key Features
- Easy transfer of flag-style carriers
- UHV conditions < 5 x10-10 Torr
- Capacity for 5 samples
The ultra-high vacuum suitcase is designed for transporting flag-style carriers between a UHV deposition system and external analysis stations. This UHV suitcase allows flag carriers to be removed from the linear buffer chamber (LBC) to a small UHV storage space, where the vacuum level is maintained by a compact pumping system with portable power supply.
More details
The UHV suitcase requires an unoccupied transfer module in the LBC, which would include the following:
- Pick‐up manipulator – to remove the carrier from the wafer trolley and allow the UHV suitcase transfer arm to pick the flag carrier.
- Viewport with LED ring for monitoring the transfer
- DN150CF to DN40CF flange adapter
- DN40CF manual VAT gate valve – to isolate the LBC from the UHV suitcase
- Special (2”/3”) carrier compatible with DCA wafer trolley to transport flag‐style carriers in the DCA system
The UHV suitcase is equipped with the following standard features:
- DN40CF VAT manual gate valve to the interstitial pumping nipple
- Compact UHV suitcase chamber with viewport to monitor flag carrier transfer to the storage station
- Storage station with vertical manual motion
- Linear transfer arm
- Transfer arm position aligner
- NEG ion getter pump with power supply
- Support frame with wheels for smooth transport between laboratories
Optional special features
- Motorized Z‐motion for the support frame allows the UHV suitcase height to be adjusted using a motor over a maximum distance of 400 mm.
- Detachable linear transfer arm allows the suitcase to be transported without the linear transfer arm. Once the UHV suitcase has been mounted to transfer module, the transfer arm can be reattached to the suitcase and rough pumped to allow the gate valve to open.
Base Pressure: | < 3×10-10 Torr |
Large cryopanel surrounds internal chamber wall | Steel |
Use temperature | 100-200 °C |
Weight | 5-10 Kg |
Delivery time | 2-3 weeks from order |
Width | 3114mm |
Width | 3114mm |
Width | 3114mm |
Width | 3114mm |

