Carriers
Sample Carriers
- Wide range of high-quality carrier materials
- Customizable single- or multi-wafer carrier design
- Compatible masks available
Sample carriers are used to transfer wafers or samples through the UHV deposition system. Available materials include:
- Tantalum,
- Molybdenum,
- Inconel,
- Haynes,
- Stainless steel
Available sizes:
Single wafer/sample | Multi-wafer/sample |
Flag-style (adapter available for 2-/3-/4-inch carrier) | – |
Square 5 mm x 5 mm, 10 mm x 10 mm, 20 mm x 20 mm | Square 5 mm x 5 mm x5, 10 mm x 10 mm x5, 20 mm x 20 mm x4 |
1×1-inch | Multi-1-inch on request |
2-inch, ¼ x 2-inch, ½ x 2-inch | 3×2-inch, 4x ¼ x 2-inch, 7×2-inch |
3-inch, ¼ x 3-inch | 3×3-inch, 4×3-inch, 7×3-inch |
4-inch, ¼ x 4-inch | 4×4-inch |
6-inch | 4×6-inch |
8-inch | 3×8-inch |
(300 mm wafer without a carrier) |
All carriers are chemically cleaned and degassed prior to shipment.
Contact DCA for more information about suitable carrier materials for your application and customized designs.