E-Beam Source (R-Series)
Electron beam module (R-Series)
Key features
- Designed for 4×15 cc multi-pocket e-beam source.
- Reload material without venting main chamber.
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More details
The e-beam module is connected to the differential pumping module in the R-Series system. The module is separated by a manual gate valve from the main growth chamber, which allows the e-beam source to be quickly reloaded without venting the main growth chamber.
The EBS module includes:
- Telemark multi-pocket electron beam source (4 x15 cc).
- ST6 power supply (6kW).
- Digital / Programmable sweeper.
- Handheld remote.
- Grounding probe.
- HV cables (10 m).
- Water-cooling lines (bakeable).
- Manual VAT CF100 gate valve.
- Rotary silicon mirror for viewing crucible pocket (manual).
- DN40CF port for QCM flux monitoring/calibration.
- DN63CF port for EIES flux monitoring/calibration.
- Water-cooled roof to reduce heat load to the growth chamber.
- Linear electro-pneumatic source shutter.
- Removable support rails for sliding the source out of the module.
- Connection to differential pumping module (including CF38 all metal right angle valve).
Optional features:
- Upgrade pocket viewport to e-p motion.
- Add camera for remotely observing the crucible pocket (includes mounting).
- Add QCM for flux monitoring.
- Add EIES for flux monitoring (with optical filters).
- Add DCA control software for remote operation.
Contact us for more information.
