Oxides / Metal Oxides

Oxide thin film materials start to play a more and more important role nowadays. Especially with the topic of Quantum Technology large research efforts have been dedicated in growing and combining oxide films and structures in Silicon Photonics. The interest in oxide deposition technologies is further fed by the limits that standard Silicon technologies are approaching (high-K material research) and by the wide range of useful properties that oxides exhibit (high dielectricity permittivities, piezo-, pyro-, and ferroelectricity, transparency, optical non linearity, high Tc-superconductivity, colossal magneto-resistivity, quantum para-electricity and giant piezoelectricity). The structural quality of oxide heterostructures now rivals that of the best conventional semiconductors.