E-Beam Source (M-Series)
EBS Module (M-Series)
- Allows source refilling without venting main growth chamber.
- Compatible with CF200 / CF250 port.
- Ideally suited for industrial processes.
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More details
Standard features include:
- Telemark single-pocket electron beam source (156cc).
- Solid state power supply (ST-6/8).
- Digital / Programmable sweeper.
- Handheld remote.
- Grounding probe.
- HV cables (10 m).
- Water-cooling lines (bakeable).
- Manual VAT CF200/CF250 gate valve.
- Removable support rails for sliding the source out of the module.
- Module with UHV linear bellows assembly (manual) and CF150 access port.
- CF38 & CF16 all-metal right angle valves for pump/vent.
Specifications
| Base Pressure: | < 3×10-10 Torr |
| Large cryopanel surrounds internal chamber wall | Steel |
| Use temperature | 100-200 °C |
| Weight | 5-10 Kg |
| Delivery time | 2-3 weeks from order |
| Width | 3114mm |
| Width | 3114mm |
| Width | 3114mm |
| Width | 3114mm |
