UHV Systems

UHV Systems

Production

M-Series

Molecular Beam Epitaxy for Metals & Oxides
(12"/300 mm wafer)

Read more

P-Series

Molecular Beam Epitaxy for III-V
(3x8" wafer)

Read more

S-Series

Production UHV Sputtering Systems for up to 12" wafers

Read more

Research

M-Series

Molecular Beam Epitaxy for Metals & Oxides
(4" wafer)

Read more

P-Series

Molecular Beam Epitaxy for III-V
(4" wafer)

Read more

R-Series

Molecular Beam Epitaxy for Oxides
(3" wafer)

Read more

S-Series

S-Series UHV Sputtering for R&D

Read more

Pulsed Laser Deposition

Pulsed Laser Deposition
(Laser MBE)

Read more

About DCA

News

Service and Support

Products

Applications