2283/8179 – Lumiphase AG, Stäfa, Switzerland

Customers Website: Lumiphase AG

• Fully automated UHV system with precision robot wafer handling
• M1000 MBE process chambers
• DCA Deposition Sources
• Rapid cassette sample loading (10x 300mm) with UHV cassette storage (10x 300mm)
• Compatibility with 300mm wafer EFEM

Key features:

Automated system for the production of BTO films on 300mm Si wafers. This system provides excellent flexibility with ports configured for multiple source types (e.g. E-Beam Sources, Effusion Cells, RF Plasma Sources, Metal-Organic Precursor Injector (MOPI) Sources, in-situ flux-control (XBS) and situ analysis). 

The system is compatible with Tier 1 Foundry specification for particle counts and trace metal contamination and shows excellent growth uniformity (BTO on Si 300mm).

Applications: 

Lumiphase designs and manufactures BTO-enhanced SiPh PICs based on proprietary technology to deliver leading-edge integration, efficiency and scalability to customers worldwide.