Fully automated 300mm UHV system for BTO deposition with precision robot wafer handling
PsiQuantum, PaloAlto, CA, USA
Customers Website: PsiQuantum
- Fully automated UHV system with precision robot wafer handling
- M1000 MBE process chambers
- DCA Deposition Sources
- Rapid cassette sample loading (25x 300mm) with UHV cassette storage (25x 300mm)
- Integrated EFEM with dual FOUP cassette
Key features:
Automated system for the production of BTO films on 300mm Si wafers. This system provides excellent flexibility with ports configured for multiple source types (e.g. E-Beam Sources, Effusion Cells, RF Plasma Sources, Metal-Organic Precursor Injector (MOPI) Sources, in-situ flux-control (XBS) and situ analysis).
The system is compatible with Tier 1 Foundry specification for particle counts and trace metal contamination and shows excellent growth uniformity (BTO on Si 300mm).
Applications:
PsiQuantum was founded on the understanding that any practical path to million-qubit systems must fully exploit the trillions of dollars and decades of work invested into the semiconductor industry. They are planning to build a quantum computer the same way one builds a supercomputer — using the same mature fabs, the same contract manufacturers, and the same fiberoptic networking.
Category:
- Production
Video credit to PsiQuantum: 300mm-BTO Production Tool (DCA M1000)
Publications/Results:









