PsiQuantum, PaloAlto, CA, USA

Customers Website: PsiQuantum

• Fully automated UHV system with precision robot wafer handling
• M1000 MBE process chambers
• DCA Deposition Sources
• Rapid cassette sample loading (25x 300mm) with UHV cassette storage (25x 300mm)
• Integrated EFEM with dual FOUP cassette

Key features:

Automated system for the production of BTO films on 300mm Si wafers. This system provides excellent flexibility with ports configured for multiple source types (e.g. E-Beam Sources, Effusion Cells, RF Plasma Sources, Metal-Organic Precursor Injector (MOPI) Sources, in-situ flux-control (XBS) and situ analysis). 

The system is compatible with Tier 1 Foundry specification for particle counts and trace metal contamination and shows excellent growth uniformity (BTO on Si 300mm).

Applications: 

PsiQuantum was founded on the understanding that any practical path to million-qubit systems must fully exploit the trillions of dollars and decades of work invested into the semiconductor industry. They are planning to build a quantum computer the same way one builds a supercomputer — using the same mature fabs, the same contract manufacturers, and the same fiberoptic networking.