Fully automated 8" UHV system with precision robot wafer handling
2286 – MIT – Cambridge, MA, USA
Customers Website: ENGINEERING QUANTUM SYSTEMS
- Fully automated UHV system with precision robot wafer handling
- M1000 MBE process chambers
- Oxygen Treatment Chamber
- Rapid cassette sample loading (10x 8”) with UHV cassette storage (10x 8”)
- Integrated XPS-Analysis
Key features:
The UHV Cluster System provides excellent flexibility and is equipped with a M1000 Metal-/Metal-Oxide MBE Chamber for 8″ wafers, an in-situ oxygen processing chamber and automated XPS-analysis capabilities.
- 2x Multi-Pocket (4x 15cc) E-Beam Evaporators with XBS for Flux Control
- 1x RF Plasma Source
- 2x retractable Effusion Cell
- 1x retractable QCM
- 1x RHEED for In-Situ Analysis
Applications:
The system supports advanced research on superconducting qubits, enabling large‑area wafer processing with MBE, in‑situ XPS, and full automation.
Category:
- R&D
- Production
