Fully automated 300mm UHV system for BTO deposition with precision robot wafer handling

PsiQuantum, PaloAlto, CA, USA

Customers Website: PsiQuantum

 

Key features:

Automated system for the production of BTO films on 300mm Si wafers. This system provides excellent flexibility with ports configured for multiple source types (e.g. E-Beam Sources, Effusion Cells, RF Plasma Sources, Metal-Organic Precursor Injector (MOPI) Sources, in-situ flux-control (XBS) and situ analysis). 

The system is compatible with Tier 1 Foundry specification for particle counts and trace metal contamination and shows excellent growth uniformity (BTO on Si 300mm).

 

Applications

PsiQuantum was founded on the understanding that any practical path to million-qubit systems must fully exploit the trillions of dollars and decades of work invested into the semiconductor industry. They are planning to build a quantum computer the same way one builds a supercomputer — using the same mature fabs, the same contract manufacturers, and the same fiberoptic networking.

Category:

  • Production

Video credit to PsiQuantum: 300mm-BTO Production Tool (DCA M1000)

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