Fully automated 8" UHV system STO / BTO deposition system with precision robot wafer handling

2284 – La Luce Cristallina – Austin, TX, USA

Customers Website: La Luce Cristallina

 

Key features:

Automated system for the production of 8″ STO/BTO wafers. This system provides excellent flexibility with ports configured for multiple source types (e-beam, effusion cells, RF plasma, (linear) sputter magnetrons), in-situ flux-control (XBS) and situ analysis.

 

Applications

La Luce Cristallina in Austin, TX USA is advancing the frontier of Silicon Photonics by integrating crystalline oxides like Barium Titanate (BTO) to enable high-performance electro-optic modulators. A key technology for future photonic applications including optical interconnects, sensing, and computing.

Category:

  • R&D
  • Production

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