2284 – La Luce Cristallina – Austin, TX, USA

Customers Website: La Luce Cristallina

• Fully automated UHV system with precision robot wafer handling
• M600 MBE (STO) and S600 Sputter (BTO) process chambers
• E-Beam Sources, Effusion Cells and APEX-L Sputter Magnetrons
• Rapid cassette sample loading (10x 8”) with UHV cassette storage (10x 8”)

Key features:

Automated system for the production of 8″ STO/BTO wafers. This system provides excellent flexibility with ports configured for multiple source types (e-beam, effusion cells, RF plasma, (linear) sputter magnetrons), in-situ flux-control (XBS) and situ analysis.

Applications: 

La Luce Cristallina in Austin, TX USA is advancing the frontier of Silicon Photonics by integrating crystalline oxides like Barium Titanate (BTO) to enable high-performance electro-optic modulators. A key technology for future photonic applications including optical interconnects, sensing, and computing.