Fully automated 8" UHV system STO / BTO deposition system with precision robot wafer handling
2284 – La Luce Cristallina – Austin, TX, USA
Customers Website: La Luce Cristallina
- Fully automated UHV system with precision robot wafer handling
- M600 MBE (STO) and S600 Sputter (BTO) process chambers
- E-Beam Sources, Effusion Cells and APEX-L Sputter Magnetrons
- Rapid cassette sample loading (10x 8”) with UHV cassette storage (10x 8”)
Key features:
Automated system for the production of 8″ STO/BTO wafers. This system provides excellent flexibility with ports configured for multiple source types (e-beam, effusion cells, RF plasma, (linear) sputter magnetrons), in-situ flux-control (XBS) and situ analysis.
Applications:
La Luce Cristallina in Austin, TX USA is advancing the frontier of Silicon Photonics by integrating crystalline oxides like Barium Titanate (BTO) to enable high-performance electro-optic modulators. A key technology for future photonic applications including optical interconnects, sensing, and computing.
Category:
- R&D
- Production










