Hybrid MBE in the heart of Paris
DCA Instruments have manufactured and delivered a unique Oxide research system for C2N, CNRS in Paris, France. As the most advanced oxide MBE system’s manufacturer, DCA Instruments we selected to develop a next generation oxide MBE system combining mono-atomic, ozone and metal-organic gas injection.
At the heart of the system, is a second generation of DCA’s successful MOPI source for metal-organic injectors for hybrid MBE. Operational on both research and industrial systems, large area deposition of STO and BTO have already been achieved in industrial settings. The Gen 2 MOPI source, will offer the flexibility to deposit Ti, V, Hf and Zr based compounds.
Key features of the R450 hybrid oxide MBE System
- R450 oxide MBE system: Engineered for optimial growth conditions under agressive oxide atmospheres.
- Multi-functional gas oxide gas injection: Molecular, atomic, ozone and metal-organic
- Wide selection of metal effussion cells
- Linear buffer chamber for sample preparation and storage
DCA Instruments are exited to be selected to support CNRS in their Nanofutur research program for oxide thin films.
