DCA has just delivered another cutting-edge, fully automated 8-inch wafer Deposition system with Analysis Capabilities to MIT in Cambridge, MA, USA.
The group of Prof. William Oliver at the Engineering Quantum Systems (EQUS) Labs at MIT are researching materials growth, fabrication and 3D integration, design, control, and measurement of superconducting qubits and their use in small scale quantum processors. They also develop cryogenic packaging and control electronics involving cryogenic complementary metal–oxide–semiconductor (CMOS) and single-flux quantum digital logic.
🔬 The system features:
- Fully automated 8″ UHV system with precision robot wafer handling
- M1000 MBE process chambers
- Oxygen Treatment Chamber
- Rapid cassette sample loading (10×8”) and UHV cassette storage (10×8”)
- Integrated XPS-Analysis
MIT System – Reference & Youtube Video
💡 Highlights:
- MBE Chamber: Equipped with 2x Multi-Pocket (4x 15cc) E-Beam Evaporators with XBS for Flux Control, 1x RF Plasma Source, 2x retractable Effusion Cells, 1x QCM and 1x RHEED for In-Situ Analysis.
- Oxygen Process Chamber: equipped with 1x RF-Plasma Source and 1x O2-Injector.
- XPS Analysis Chamber: equipped with a 5-Axis 8” Wafer Manipulator, XPS Analyser and Monochromated X-Ray Source
