Arsenic Valved Cracker
Arsenic Valved Cracker
Key features
- Fast and precise on/off control with motorised needle valve .
- Stable and repeatable performance.
- Apertures designed for excellent flux uniformity.
- Tank capacity up to 4000 cc.
More details
The Arsenic valved cracker provides a stable arsenic flux with rapid on/off response. The source is comprised of three main parts:
- The tank stores and sublimes the As material. Tank capacity is available for 500 cc, 1000 cc, 2000 cc, and 4000 cc.
- The needle valve is motorised to provide precise on/off control of the arsenic beam equivalent pressure (BEP) to the chamber.
- The molecule cracking zone effectively cracks arsenic to supply As2 to the chamber.
Each part features separate heating and cooling to provide greater process control and optimal thermal stability during operation.
Specifications
Tank dimensions (Volume) (diameter x height) | 66 x 140 mm (500 cc) 114 x 150 mm (1000 cc) 114 x 200 mm (2000 cc) 166 x 211 mm (4000 cc) |
| Aperture | PBN-A-1 for ≤ 4” wafer PBN-A-2 for > 4” wafer |
| Tank temperature | 450 °C |
| Valve temperature | 450 °C |
| Cracking temperature | 1300 °C |
| Temperature stability | Better than ± 0.1°C |
| Thermocouple type | Tank: K-type Valve: K-type Cracking zone: C-type |
| In-vacuum length | 292 mm |
| Outer diameter (OD) | 63 mm |
| Mounting flange | DN100CF |
| Cooling water | Tank/valve: >1 l/min, max 30 °C Cracking zone: > 0.5 l/min, max 30 °C |
